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Path: Home » Indice Pubblicazioni » Convegni ATI - Accesso riservato soci CTI » CA - 49 - Perugia 1994 » Flow of evaporated gas through channe...

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Flow of evaporated gas through channel into vacuum

Pubblicazione


Autore: M.J. Gradoboev, I.N. Larina, V.A. Rykov, E.M. Shakhov

Collana: CA - 49 - Perugia 1994

Note:
The paper deals with numerical analysis of two-dimensional rarefied gas flow in a slot of finite length. Gas is a vapor emitted from the left plane end surface of the channel and completely absorbed at the right-hand side plane surface of the channel. The problem can be treated as a model for some physical and/or technological processes. One of them is rarefied flow of discharge gas in a sputtering chamber which is used in microelectronics for thin films fabrication. Another application of the problem is a modeling of evaporation of a liquid metal through a crack in a wall of atomic power stations on a board of space satellite. The problem is stated for the kinetic Boltzamann equation with a model collision term in the BGK form and solved by finite difference method. The main attention is paid to total mass flux as a function of the Knudsen number for different lenght of channel. The results are in a good accordance with that obtained by Monte Carlo Direct Simulation technique.


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